The fused silica glass ring can help manage a contamination-free of charge surroundings, crucial for accomplishing dependable wafer quality and large approach yields.
Appropriate for use in fields of leading edge engineering which include gas mobile batteries because of its thermal resistance and insulation.
Later on, the corporate will carry on to deeply cultivate the sector of quartz solutions, continuously increase technological innovation and output technologies degrees, and attempt to provide international buyers with bigger-quality and even more Specialist quartz product answers, contributing for the significant-high-quality advancement of significant-close manufacturing and scientific research fields.
Customizable: We can easily deliver quartz rings for your precise specifications for interior diameter, outer diameter, and thickness/peak.
Its exact dimensions ensure best in shape and alignment in furnace assemblies, contributing to uniform gas stream and temperature Handle during procedures including CVD, diffusion, and annealing.
Serves as sealing rings and electrode fixing rings for UV lamps, mercury lamps, and xenon lamps, resisting higher temperature and UV radiation.
This products was developed to be a higher temperature thermal insulation for instance in diffusion furnace and CVD devices Utilized in semiconductor manufacturing procedures.
Acts like a protecting component to prevent a variety of contaminations during the etching manufacturing approach, ensuring sealing and security of your chamber. It really is applied in wafer manufacturing etching procedures, which are small-temperature processes.
・This ring can be made to match the shape of the quartz tube and silicon carbide tube loaded during the furnace.
In plasma etching (Dry Etch) processes, the quartz ring acts like a protecting barrier towards plasma erosion and ion bombardment, shielding the chamber’s metallic surfaces from contamination and particle technology.
・We advise reed-shaped quartz insulation ring for semiconductor furnace filler with to stay away from particle technology in areas that were full of silica wool.
2 µm). This mixture of purity and precision minimizes particle technology and supports reliable procedure repeatability throughout large-quantity semiconductor manufacturing lines. We anticipate your further more inquiry.
Normal quartz rings, though chemically pure and thermally steady, transmit more thermal radiation and are much better suited for common-goal applications where by insulation is a quartz insulation ring for semiconductor furnace lot less essential.
Choosing among OP and regular quartz rings is determined by process necessities, furnace design and style, and the necessity for thermal uniformity and wafer protection.